Research group of Dr. Nicolas Boscher from the Luxembourg Institute of Science and Technology (LIST) made progress on the low-temperature synthesis and deposition of crystalline transition metal oxides and published their work on ACS Appl. Mater. Interfaces.
Many strategies have been proposed for the formation of functional crystalline transition metal oxide coatings. In this work, the simultaneous synthesis and deposition of anatase titanium dioxide (TiO2) from a single-step, low-temperature and atmospheric-pressure approach is demonstrated. The proposed method overcomes the challenge of forming crystalline transition metal oxide coatings on polymer substrates by using a dry and up-scalable method. The careful selection of both the plasma source and the titanium precursor allowed the deposition of well-adherent, dense, and crystalline TiO2 coatings on poly(methyl methacrylate) (PMMA) optical fibres. The novel atmospheric-pressure plasma-enhanced chemical vapour deposition (AP-PECVD) process is inherently suitable to other crystalline transition-metal oxides and could reach other functionalities, such as electrochromic or thermochromic coatings and electrical conductivity.

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